A Novel Approach to Multi-level Evolutionary Design Optimization of a MEMS Device

This paper introduces a novel approach to the evolutionary design optimisation of an MEMS bandpass filter, incorporating areas of multi-disciplinary, multi-level and multi-objective design optimisation in the process. In order to demonstrate this approach a comparison is made to previous attempts to design similar bandpass filters, providing comparable results at a significant reduction in functional evaluations. In this endeavour, a circuit equivalent of the MEMS bandpass filter is evolved extrinsically using the SPICE Simulator.