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Sequential turret source-masking system for fabrication of multilayer structures

Anthopoulos, T.D. and SADAT-SHAFAI, Torfeh (2000) Sequential turret source-masking system for fabrication of multilayer structures. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 18 (5). pp. 2595-2596. ISSN 07342101

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Abstract or description

The design of sequential turret source-masking system for used in the fabrication of multilayer structures is studied. The system's component parts include: the masking system, the driving shaft connecting the four position turret source with the support plate, and the four position turret. The system in operation has produced samples with excellent dimensional accuracy operating satisfactorily up to designed temperatures.

Item Type: Article
Additional Information: cited By 4
Faculty: School of Creative Arts and Engineering > Engineering
Depositing User: Library STORE team
Date Deposited: 10 May 2018 09:15
Last Modified: 24 Feb 2023 13:51

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